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Characterisation
of ultrafast micro-structuring of alumina (Al2O3)
Proc.
SPIE Int. Soc. Opt. Eng. 5714, 43 (2005)
W.
Perrie, A. Rushton, M. Gill, P. Fox, W. O’Neill
Alumina
ceramic, Al2O3,
presents a challenge to laser micro-structuring due to
its neglible linear absorption coefficient in the optical
region coupled with its physical properties such as extremely
high melting point and high thermal conductivity. In this
work, we demonstrate clean micro-structuring of alumina
using NIR (775 nm) ultrafast optical pulses with 180 fs
duration at 1kHz repetition rate. Sub-picosecond pulses
can minimise thermal effects along with collateral damage
when processing conditions are optimised, consequently,
observed edge quality is excellent in this regime. We
present results of changing micro-structure and morphology
during ultrafast processing along with measured ablation
rates and characteristics of developing surface relief.
Initial crystalline phase (alpha Al2O3
) is unaltered by femtosecond processing. Multi-pulse
ablation threshold fluence Fth
~ 1.1 Jcm-2 and at low fluence ~ 3 Jcm-2, independent
of machined depth, there appears to remain a ~ 2µm thick
rapidly re-melted layer. On the other hand, micro-structuring
at high fluence F ~ 21 Jcm-2 shows no evidence of melting
and the machined surface is covered with a fine layer
of debris, loosely attached. The nature of debris produced
by femtosecond ablation has been investigated and consists
mainly of alumina nanoparticles with diameters from 20
nm to 1 micron with average diameter ~ 300 nm. Electron
diffraction shows these particles to be essentially single
crystal in nature. By developing a holographic technique,
we have demonstrated periodic micrometer level structuring
on polished samples of this extremely hard material.
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